Principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board
Principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board
复制标题
基于印刷电路板工艺的集成到印刷电路板的压电微流泵的原理和结构
DOI：
10.1177/1045389x19869519
复制
发表时间：
2019-08-30
影响因子：
2.7
通讯作者：
Yu, Huai-Qiang
中科院分区：
文献类型：
--
作者：
Wang, Dai-Hua;Tang, Lian-Kai;Yu, Huai-Qiang
考虑到成熟的印刷电路板工艺，研究可集成到印刷电路板上的微流控泵将为微流控系统的进一步小型化和低成本集成提供解决方案。提出并实现了一种基于印刷电路板工艺的压电微流泵的原理和结构。以印刷电路板为平台，研究了基于印刷电路板工艺的集成压电微流泵设计与制造技术。对所制作的微流泵的流量特性进行了实验测试。研究结果表明，所提出的压电微流泵原理和结构可以利用成熟的印刷电路板工艺实现，具有结构简单、加工方便的优点。所制作的基于印刷电路板工艺的微流体泵可以线性地泵入和泵出流体，并具有自注入。此外，可以通过改变驱动电压的峰峰值、频率和相位差来控制流量和背压。瞬时流量具有与驱动电压频率一致的脉动特性。所提出的原理和结构有利于将基于印刷电路板工艺的微流控泵与其他微流控元件集成，在印刷电路板上实现复杂的微流控系统。
Considering mature printed circuit board processes, researches on microfluidic pumps that can be integrated into printed circuit board will provide a solution for further miniaturization and integration of microfluidic systems with low costs. The principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board are proposed and realized in this article. The printed circuit board process-based design and manufacturing technology of a piezoelectric microfluidic pump integrated into printed circuit board is researched utilizing printed circuit board as a platform. The flow characteristics of the fabricated microfluidic pump are experimentally tested. The research results show that the proposed principle and structure of the piezoelectric microfluidic pump can be fabricated utilizing mature printed circuit board process with advantages of simple structure and convenient processing. The fabricated printed circuit board process-based microfluidic pump can linearly pump in and pump out fluid with self-injection. Moreover, the flow rate and back pressure can be controlled by changing the peak-to-peak value, frequency, and phase difference of the driving voltages. The instantaneous flow rate has the pulsation property consistent with the drive voltage frequency. The proposed principle and structure are beneficial to integrate the fabricated printed circuit board process-based microfluidic pump with other microfluidic components to realize complicated microfluidic systems on printed circuit board.