Chemically reduced lithium niobate single crystals: Processing, properties and improved surface acoustic wave device fabrication and performance
Chemically reduced lithium niobate single crystals: Processing, properties and improved surface acoustic wave device fabrication and performance
复制标题
DOI：
10.1063/1.369775
复制
发表时间：
1999-03
影响因子：
3.2
通讯作者：
P. Bordui;D. Jundt;E. M. Standifer;R. Norwood;R. Sawin;J. Galipeau
中科院分区：
文献类型：
--
作者：
P. Bordui;D. Jundt;E. M. Standifer;R. Norwood;R. Sawin;J. Galipeau
在350 ~ 750℃的不同温度下，利用氮气/氢气气氛对铌酸锂单晶片进行化学还原。经测量，还原晶圆具有增加的光吸收率和增加的直流电导电性，这是还原加工温度的函数。吸光度增加大于1000倍；电导率可以提高105倍以上。标准的78 MHz表面声波（SAW）滤波器成功地使用减少晶圆制造，并显示出在热循环过程中对虚假热释电充电效应的抵抗能力增加。观察到的光吸收率和直流电导率的增加也有望为SAW器件的制造工艺提供好处。
Lithium niobate single-crystal wafers were chemically reduced using nitrogen/hydrogen atmospheres at a variety of temperatures between 350 and 750 °C. Reduced wafers were measured to have increased optical absorptivity and increased direct current (dc) electrical conductivity as a function of reduction-processing temperature. Absorptivity increases were measured larger than 1000×; conductivity could be increased by more than a factor of 105. Standard 78 MHz surface acoustic wave (SAW) filters were successfully fabricated using reduced wafers, and shown to have increased resistance to spurious pyroelectric charging effects during thermal cycling. The observed increases in optical absorptivity and dc electrical conductivity can also be expected to provide benefits for SAW device fabrication processing.