A compact high-precision periodic-error-free heterodyne interferometer
A compact high-precision periodic-error-free heterodyne interferometer
复制标题
DOI：
10.1364/josaa.396298
复制
发表时间：
2020-09-01
影响因子：
1.9
通讯作者：
Guzman, Felipe
中科院分区：
文献类型：
--
作者：
Joo, Ki-Nam;Clark, Erin;Guzman, Felipe
我们介绍了一种紧凑型外差干涉仪的设计、台式设置和实验结果，该干涉仪在100 MHz以上的频率上实现了空气中皮秒级的位移灵敏度。空间分离光束的光学配置防止了频率和偏振混频，因此消除了周期性误差。该干涉仪旨在最大化共模激光光束路径，以获得对环境干扰的高度抑制，如温度波动和声学。我们的实验结果证明了系统在静态和动态测量中的短期和长期稳定性。此外，我们提供了将我们的干涉仪原型与商业系统进行比较的测量，验证了我们更高的灵敏度(下午3点)、更高的热稳定性(高2倍)和无周期误差性能。(C)2020年美国光学学会
We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance. (C) 2020 Optical Society of America