A Novel System of an lnductively Coupled Thermal Plasmawith Pulse Amplitude Modulation of Electromagnetic Field
A Novel System of an lnductively Coupled Thermal Plasmawith Pulse Amplitude Modulation of Electromagnetic Field
复制标题
电磁场脉冲幅度调制感应耦合热等离子体的新型系统
DOI：
10.1541/ieejfms1990.120.11_972
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发表时间：
2000
影响因子：
--
通讯作者：
M. Katsuki
中科院分区：
文献类型：
--
作者：
T. Sakuta;Yasunori Tanaka;Y. Hashimoto;M. Katsuki
研制了一种基频为450 kHz的感应耦合热等离子体系统。该系统具有以10 ms量级的周期性地调制线圈电流的幅度的能力，包括额定功率为50 kW的逆变器电源、具有10匝线圈的感应等离子体炬和真空室。线圈电流的受控调制可以使等离子体有意地处于各种瞬态状态。在大气压条件下，在30 kW的等离子体功率下成功地产生了Ar-H2脉冲调制电感耦合等离子体。脉冲的接通时间和关断时间分别设置为10 ms和5 ms，用于稳定的脉冲调制等离子体建立，并且线圈电流的幅度的最小值与最大值的比率可以设置为61.7%。为了研究等离子体动力学在这种脉冲模式下的瞬态行为，在波长为751 nm的氩原子光谱线的光谱观测。结果表明，脉冲调制等离子体具有2-5 ms量级的上升或下降的特征时间。用Boltzmann作图法从光谱测量中估计了Ar原子的激发温度，发现随着线圈电流幅度的脉冲调制，激发温度在5000 ~ 10000 K之间呈周期性变化。
A novel system of an inductively coupled thermal plasma with a fundamental frequency of 450 kHz has been developed. This system has a capability of modulating the amplitude of the coil current periodically with a cycle of the order of 10 ms, including an inverter power supply rated with a power of 50 kW, an induction plasma torch with a 10 turns coil and vacuum chamber. The controlled modulation of the coil current can lead the plasma to be under various transient state intentionally. A pulse modulated inductively coupled plasma of Ar-H2 plasma was successfully generated at a plasma power of 30 kW under the atmospheric pressure condition. The on-time and off-time of the pulsation was set to 10ms and 5ms, respectively, for a stable pulse modulated plasma establishment, and the ratio of minimum to maximum of the amplitude of the coil current can be set down to 61.7%. In order to investigate the transient behavior of the plasma dynamics in such a pulsing mode, spectroscopic observations of an argon atomic spectral line at a wavelength of 751 nm were made. It was found that the pulse modulated plasma has a characteristic time of the order of 2-5 ms to rise or to decrease. The excitation temperature of Ar atom was estimated from the spectroscopic measurement by the Boltzmann plot method, and it was found to change periodically from 5000 to 10000 K with the pulse modulation of the amplitude of the coil current.