Pinhole-free YSZ self-supported membranes for micro solid oxide fuel cell applications
Pinhole-free YSZ self-supported membranes for micro solid oxide fuel cell applications
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用于微型固体氧化物燃料电池应用的无针孔 YSZ 自支撑膜
DOI：
10.1016/j.ssi.2011.09.011
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发表时间：
2012
影响因子：
3.2
通讯作者：
A. Tarancón
中科院分区：
文献类型：
--
作者：
I. Garbayo;G. Dezanneau;C. Bogicevic;J. Santiso;I. Gràcia;N. Sabaté;A. Tarancón
用于微固体氧化物燃料电池应用的氧化钇稳定氧化锆薄膜是通过脉冲激光沉积在硅基微加工基板上生长的。为了获得无针孔膜，研究了靶材的微观结构对颗粒喷射到膜上的影响。对不同氧化钇含量（3 mol% Y2O3: ZrO2 和 8 mol% Y2O3: ZrO2）和通过不同烧结方法（传统烧结和放电等离子烧结）制造的靶材进行了评估。对靶材和沉积膜的微观结构和电性能进行了评估，得出的结论是，使用氧化钇含量和晶粒尺寸较小的靶材，以及预期更好的机械性能，可以大大减少膜中的颗粒，而不会对电阻产生显着影响。通过放电等离子烧结制备的 3 mol% Y2O3:ZrO2 靶已被证明可以提供几乎无针孔的膜。
Yttria-stabilized zirconia thin films for microsolidoxidefuelcellapplications were grown by pulsed laser deposition onto silicon-based microfabricated substrates. In order to obtain pinhole-freemembranes, the influence of the microstructure of the target on the ejection of particulates to the film was studied. Targets with different contents of yttria (3 mol% Y2O3: ZrO2 and 8 mol% Y2O3: ZrO2) and fabricated by different sintering methods (conventional sintering and spark plasma sintering) were evaluated. Microstructural and electrical properties of targets and deposited membranes were evaluated concluding that the use of targets with smaller yttria content and grain size, with expected better mechanical properties, drastically reduces the particulates in the membranes without significant effect on the resistance. 3 mol% Y2O3:ZrO2 targets prepared by spark plasma sintering have been proven to provide almost pinhole-freemembranes.