An 8-Bit Digitally Operated Micromachined Accelerometer
An 8-Bit Digitally Operated Micromachined Accelerometer
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DOI：
10.1109/jmems.2020.3026258
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发表时间：
2020-10-01
影响因子：
2.7
通讯作者：
Pourkamali, Siavash
中科院分区：
文献类型：
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作者：
Abbasalipour, Amin;Nikfarjam, Hamed;Pourkamali, Siavash
这项工作成功实现了8位数字操作微机械加速度计并进行了表征。这种装置包括具有8组静电调谐电极的静电可调谐加速开关。类似于二进制数中的位，每个电极组的调谐力相对于相邻电极组增加2倍。制造的装置已经与微控制器接口，通过控制不同调谐电极的状态（ON或OFF）来执行二分搜索，以解释具有8位分辨率的加速度。测量结果表明，施加的加速度和控制器报告的传感器的二进制加速度输出之间的良好协议。测试的8位原型具有2.7g的满量程加速度，分辨率为10.5 mg s（满量程的1/2（8））。这种器件只需要偏置电压即可工作（零静态电流），并可通过数字控制器直接读取开关输出（数字高电压或低电压），因此无需模拟前端，可实现超低功耗加速度计。[2020-0201] 2020-0201 - 2020年中国国际纺织品展览会
This work presents successful implementation and characterization of an 8-bit digitally operated micromachined accelerometer. Such device is comprised of an electrostatically tunable acceleration switch with 8 sets of electrostatic tuning electrodes. Similar to bits in a binary number, the tuning force of each electrode set increases by a factor of 2 with respect to the adjacent electrode set. A fabricated device has been interfaced with a micro-controller performing a binary search by controlling state of different tuning electrodes (ON or OFF) to interpret the acceleration with 8 bits of resolution. Measurement results show good agreement between the applied acceleration and the binary acceleration output of the sensor reported by the controller. The tested 8-bit prototype has full-scale acceleration of 2.7g with resolution 10.5 mg s (1/2(8) of full scale). Requiring only a bias voltage for operation (zero static current) and readout of the switch output (a digital high or low voltage) that can be performed directly by a digital controller, such devices can lead to ultra-low power accelerometers by eliminating the need for an analog-front-end. [2020-0201]