Exploiting interface patterning for adhesion control
Exploiting interface patterning for adhesion control
复制标题
利用界面图案进行粘附控制
DOI：
10.1016/j.jmps.2021.104740
复制
发表时间：
2022
影响因子：
5.3
通讯作者：
Bassani, John L.
中科院分区：
文献类型：
--
作者：
Zhao, Ranny R.;Turner, Kevin T.;Bassani, John L.
表面力介导的粘附，例如通过货车德瓦尔斯力，对于在没有化学键合或粘合剂层的情况下直接键合散装固体是关键的。然而，由于表面粗糙度或有意的图案化，没有两个表面是理想平坦或完美共形的。当粘附时，非零表面牵引力出现在界面的局部分离不同于其内在平衡分离的地方，从而诱导拉伸和压缩应力区域。对这种不完美的粘附的基本理解是重要的，并且开启了在各种应用中控制界面强度和韧性的机会，包括MEMS/NEMS，微转印和制造先进3D集成电路的工艺。本文研究了非共形表面直接粘附的基本原理，考察了（i）内在的牵引-分离关系（TSR），（ii）界面形貌，（iii）粘附体的弹性性质之间的相互作用。当界面分离小于平衡分离时，采用的TSR方法考虑了强斥力，并且只考虑了法向表面力。有效的TSR性能，包括整体粘附强度和分离功，由数值计算确定。得到了刚性散状固体的简单封闭形式解。本文建立了一个利用周期单元内粘性单元的有限元模型，用于研究弹性固体中非均匀变形的情况。
Surface force-mediated adhesion, e.g. via van der Waals forces, is critical for direct bonding of bulk solids in the absence of chemical bonding or an adhesive layer. However, no two surfaces are ideally flat or perfectlyconformaldue to surface roughness or intentional patterning. When adhered, non-zero surface tractions arise wherever the local separation of the interface differs from its intrinsic equilibrium separation, inducing regions of tensile and compressive stresses. A fundamental understanding of such imperfect adhesion is important and unlocks opportunities to control interfacial strength and toughness in various applications including MEMS/NEMS, micro-transfer printing, and processes to manufacture advanced 3D integrated-circuits. This paper investigates the fundamentals of direct adhesion ofnon-conformalsurfaces by examining the interplay of the (i) intrinsic traction-separation relation (TSR), (ii) interface topography, and (iii) elastic properties of the adhered bodies. The TSR adopted accounts for strong repulsion when the interface separation is less than the equilibrium separation, and only the normal surface tractions are considered. The effective TSR properties, including the overall adhesion strength and work of separation, are determined from numerical calculations. Simple closed-form solutions are obtained for rigid bulk solids. A finite element model utilizing cohesive elements in a periodic cell is constructed to study cases with non-uniform deformation in the elastic solids.