Additive-manufacturing of 3D glass-ceramics down to nanoscale resolution
Additive-manufacturing of 3D glass-ceramics down to nanoscale resolution
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DOI：
10.1039/c8nh00293b
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发表时间：
2019-05-01
影响因子：
9.7
通讯作者：
Malinauskas, Mangirdas
中科院分区：
文献类型：
--
作者：
Gailevicius, Darius;Padolskyte, Viktorija;Malinauskas, Mangirdas
一个真正的3D无机陶瓷的分辨率下降到纳米级（约100 nm），使用溶胶-凝胶抗蚀剂前体的制造证明。该方法具有不受限制的自由成形能力、填充因子的控制和高制造吞吐量。基于超快激光3D光刻的有机-无机混合溶胶-凝胶树脂，然后通过热处理，使无机非晶和结晶复合材料的形成引导的初始树脂的组合物的建议方法的系统研究。对于复杂的自由形式架构的3D图案，获得了100 nm的分辨率。实现每秒50 × 10（3）体素的制造吞吐量;体素-通过单脉冲曝光记录的单个体积元素。使用曝光后热处理来形成陶瓷相，其组成和结构取决于热处理的温度和持续时间，如通过拉曼显微光谱所揭示的。X射线衍射（XRD）显示在较高温度下逐渐出现的结晶相，具有方石英SiO2（高温多晶型物）的特征。此外，观察到以其高断裂强度而闻名的四方氧化锆相。这种3D纳米烧结技术可从纳米尺度扩展到毫米尺度，并为各种晶体无机材料的光学3D纳米打印开辟了一条概念上的新途径，这些材料由初始组合物定义，用于设计用于在恶劣的物理和化学环境中以及高温下工作的微器件的各种应用。
Fabrication of a true-3D inorganic ceramic with resolution down to the nanoscale (approximate to 100 nm) using a sol-gel resist precursor is demonstrated. This method has an unrestricted free-form capability, control of the fill-factor, and high fabrication throughput. A systematic study of the proposed approach based on ultrafast laser 3D lithography of organic-inorganic hybrid sol-gel resin followed by a heat treatment enabled the formation of inorganic amorphous and crystalline composites guided by the composition of the initial resin. The achieved resolution of 100 nm was obtained for 3D patterns of complex free-form architectures. Fabrication throughput of 50 x 10(3) voxels per second is achieved; voxel - a single volume element recorded by a single pulse exposure. A post-exposure thermal treatment was used to form a ceramic phase, the composition and structure of which were dependent on the temperature and duration of the heat treatment as revealed by Raman micro-spectroscopy. The X-ray diffraction (XRD) showed a gradual emergence of the crystalline phases at higher temperatures with a signature of cristobalite SiO2, a high-temperature polymorph. Also, a tetragonal ZrO2 phase known for its high fracture strength was observed. This 3D nano-sintering technique is scalable from nanoscale to millimeter dimensions and opens a conceptually novel route for optical 3D nano-printing of various crystalline inorganic materials defined by an initial composition for diverse applications for microdevices designed to function in harsh physical and chemical environments and at high temperatures.