Polarization-dependent GaN surface grating reflector for short wavelength applications
Polarization-dependent GaN surface grating reflector for short wavelength applications
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DOI：
10.1364/oe.17.022535
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发表时间：
2009-12-07
期刊：
影响因子：
3.8
通讯作者：
Jeon, Heonsu
中科院分区：
文献类型：
--
作者：
Lee, Joonhee;Ahn, Sungmo;Jeon, Heonsu
本研究提出了 GaN 表面上的一维亚波长光栅结构，其充当蓝色波长范围内的横向电偏振光的反射器。采用严格的耦合波分析方法分析了各种结构参数对光栅反射光谱的影响。基于优化设计，采用全息光刻和干法刻蚀工艺制备了GaN表面光栅反射器（SGR）。它的反射率在 60 nm 带宽内超过 90%。得到的实验结果与模拟结果吻合良好。 SGR具有结构简单的优点，这将极大地促进基于GaN的短波长光子器件上高反射器的制造和集成。 (C) 2009 美国光学学会
This study proposes a one-dimensional sub-wavelength grating structure on GaN surface which behaves as a reflector for transverse-electric polarized light in the blue wavelength range. The rigorous coupled-wave analysis method was used to analyze the effects of various structural parameters on the reflectance spectra of the grating. Based on the optimal design, a GaN surface grating reflector (SGR) was fabricated using holographic lithography and dry etching processes. It showed reflectance that exceeded 90% over a 60-nm bandwidth. The obtained experimental results were in good agreement with simulated ones. The SGR has an advantage of structural simplicity, which should greatly facilitate the fabrication and integration of high reflectors on GaN-based short-wavelength photonic devices. (C) 2009 Optical Society of America