Finite element analysis of the effect of electrodes placement on accurate resistivity measurement in a diamond anvil cell with van der Pauw technique
Finite element analysis of the effect of electrodes placement on accurate resistivity measurement in a diamond anvil cell with van der Pauw technique
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DOI：
10.1063/1.3374466
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发表时间：
2010-05
影响因子：
3.2
通讯作者：
Bao-Ning Wu;Xiaowei Huang;Yonghao Han;C. Gao;Gang Peng;Cailong Liu;Yue Wang;Xiaoyan Cui;G. Zou
中科院分区：
文献类型：
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作者：
Bao-Ning Wu;Xiaowei Huang;Yonghao Han;C. Gao;Gang Peng;Cailong Liu;Yue Wang;Xiaoyan Cui;G. Zou
货车范德堡技术被广泛用于测定材料的电阻率。在金刚石压砧中，样品在高压下会发生接触位置的变化。利用有限元分析方法，研究了压力引起的触点位置误差对货车德堡法电阻率测量精度的影响。结果表明，触点位置对测量精度有显著影响。当接触中心与试样周边的间距B小于D/9（试样直径）时，该方法能准确测定试样的电阻率。接触位置越靠近试样中心，接触位置误差对精度的影响越大。对于相同的接触位置，接触尺寸误差对半导体样品的影响更为明显。
The van der Pauw technique is widely used to determine resistivity of materials. In diamond anvil cell the compressed sample will make the contact placement change under high pressure. Using finite element analysis, we study the effect of contact placement error induced by pressure on the resistivity measurement accuracy of van der Pauw method. The results show the contact placement has a significant effect on determination accuracy. This method can provide accurate determination of sample resistivity when the spacing b between the contact center and sample periphery is less than D/9 (sample diameter). And the effect of contact placement error on accuracy rapidly increases as the contact location is closing to the sample center. For the same contact placement, the contact size error has a more obvious effect on the semiconductor sample.