Y.Nakamura,et al: "A New In-Situ Probing Method with an Atomic Scale Resolution for Thin Film Depositiom : Surface Photo-Interference(SPI)" Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium. 387-390 (1995)
Y.Nakamura,et al: "A New In-Situ Probing Method with an Atomic Scale Resolution for Thin Film Depositiom : Surface Photo-Interference(SPI)" Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium. 387-390 (1995)
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Y.Nakamura等人:“薄膜沉积的原子级分辨率的新原位探测方法:表面光干涉(SPI)”1995年日本国际电子制造技术研讨会论文集。
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