Computational study of heat transfer and gas dynamics in the pulsed laser evaporation of metals
Computational study of heat transfer and gas dynamics in the pulsed laser evaporation of metals
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DOI：
10.1063/1.359817
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发表时间：
1995-10
影响因子：
3.2
通讯作者：
J. Ho;C. Grigoropoulos;J. Humphrey
中科院分区：
文献类型：
--
作者：
J. Ho;C. Grigoropoulos;J. Humphrey
持续时间为纳秒的脉冲激光照射被用于各种应用，包括激光沉积薄膜和微加工。最重要的是预测蒸发物质的去除率，以及抛射粒子的速度、密度和温度分布，作为激光脉冲能量、时间分布和靶材表面辐射密度的函数。为了解决这些问题，本工作建立了一种新的计算方法，用于彻底处理金属脉冲激光加工中的传热和流体流动现象。固体衬底和液体熔体中的热传导采用一维非稳态热传导模型求解。喷出的高压蒸汽在周围的背景压力下产生冲击波。可压缩气体动力学通过求解质量、动量和能量的欧拉方程组进行数值计算，并辅之以等偏心方程。
Pulsed laser irradiation of nanosecond duration is used in a variety of applications, including laser deposition of thin films and micromachining. Of fundamental interest is the prediction of the evaporative material removal rates, as well as the velocity, density, and temperature distributions of the ejected particles as functions of the laser‐beam pulse energy, temporal distribution, and irradiance density on the target material surface. In order to address these issues, the present work establishes a new computational approach for the thorough treatment of the heat transfer and fluid flow phenomena in pulsed laser processing of metals. The heat conduction in the solid substrate and the liquid melt is solved by a one‐dimensional transient heat transfer model. The ejected high‐pressure vapor generates shock waves against the ambient background pressure. The compressible gas dynamics is computed numerically by solving the system of Euler equations for mass, momentum, and energy, supplemented by an isentro...