AuGe-Alloy Source and Drain Formation by the Lift-Off Process for the Scaling of Bottom-Contact Type Pentacene-Based OFETs

AuGe-Alloy Source and Drain Formation by the Lift-Off Process for the Scaling of Bottom-Contact Type Pentacene-Based OFETs
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通过剥离工艺形成金锗合金源极和漏极,以缩小底部接触型并五苯基 OFET

DOI:
10.1587/transele.2018omp0008
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发表时间:
2019
影响因子:
0.5
通讯作者:
MAEDA Yasutaka
MAEDA Yasutaka
中科院分区:
工程技术4区
文献类型:
--
作者:
OHMI Shun-ichiro;HIROKI Mizuha;MAEDA Yasutaka

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