K.Miyazaki,T.Kajiwara,K.Uchino,K.Muraoka,T.Okada and M.Maeda: "Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations" Journal of Vacuum Science & Technlogy A. Vol
K.Miyazaki,T.Kajiwara,K.Uchino,K.Muraoka,T.Okada and M.Maeda: "Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations" Journal of Vacuum Science & Technlogy A. Vol
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K.Miyazaki、T.Kajiwara、K.Uchino、K.Muraoka、T.Okada 和 M.Maeda：“利用莱曼-α 双光子和同时巴尔默-α 激发的激光诱导荧光检测硅烷等离子体中的氢原子
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