Noise in microelectromechanical system resonators
Noise in microelectromechanical system resonators
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DOI：
10.1109/58.808881
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
J. Vig;Yoonkee Kim
中科院分区：
文献类型：
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作者：
J. Vig;Yoonkee Kim
已经提出了基于微机电系统 (MEMS) 和纳机电系统 (NEMS) 的谐振器和滤波器，频率范围从 kHz 到 GHz。本文研究了此类谐振器的稳定性如何随尺寸变化的问题，重点是噪声特性。当谐振器的尺寸变小时，在宏观器件中可以忽略不计的不稳定性就会变得突出。探讨了温度波动、吸附/解吸分子、脱气、布朗运动、约翰逊噪声、驱动功率和自热以及随机振动的影响。当器件较小时，光子、声子、电子和吸附分子数量波动的影响都会影响噪声特性。对于除随机振动引起的噪声之外的所有噪声，减小尺寸都会增加噪声。特别是在亚微米尺寸下，由于温度波动、约翰逊噪声和吸附/解吸引起的频率噪声可能会限制超小型谐振器的应用。
Microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) based resonators and filters, ranging in frequencies from kHz to GHz, have been proposed. The question of how the stabilities of such resonators scale with dimensions is examined in this paper, with emphasis on the noise characteristics. When the dimensions of a resonator become small, instabilities that are negligible in macro-scale devices become prominent. The effects of fluctuations in temperature, adsorbing/desorbing molecules, outgassing, Brownian motion, Johnson noise, drive power and self-heating, and random vibration are explored. When the device is small, the effects of fluctuations in the numbers of photons, phonons, electrons and adsorbed molecules can all affect the noise characteristics. For all but the random vibration-induced noise, reducing the dimensions increases the noise. At submicron dimensions, especially, the frequency noise due to temperature fluctuations, Johnson noise, and adsorption/desorption are likely to limit the applications of ultra-small resonators.