Formation of ideally ordered porous anodic zirconia by anodization of vacuum deposited Zr on molds
Formation of ideally ordered porous anodic zirconia by anodization of vacuum deposited Zr on molds
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DOI：
10.1116/6.0000864
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发表时间：
2021-03-01
影响因子：
1.4
通讯作者：
Masuda, Hideki
中科院分区：
文献类型：
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作者：
Kondo, Toshiaki;Tamura, Touko;Masuda, Hideki
我们研究了通过氧化具有织构图案的锆阳极来形成理想有序的纳米多孔氧化锆。通过从具有有序凸起阵列的金属(Ni)模具上剥离溅射的锆膜，在Zr表面形成织构图案。与纳米压痕织构不同的是，目前的织构工艺不需要将模具压在锆表面上。在表面有织构图案的锆阳极氧化过程中，每一个凹陷都是形成纳米孔的起点，这是一个理想的凹面阵列。通过本工艺得到了具有理想有序纳米孔阵列的多孔阳极氧化锆膜。多孔阳极氧化锆纳米孔间距与织构模式一致。
We studied the formation of ideally ordered nanoporous zirconia by anodizing Zr having a texturing pattern. A texturing pattern was formed on a Zr surface by peeling off a sputtered zirconium film from a metal (Ni) mold having an ordered array of convexes. In contrast to texturing by nanoimprinting, the present texturing process never requires the pressing of a mold onto the Zr surface. During the anodization of Zr that has a texturing pattern on its surface, which is an ideally ordered array of concaves, each concave acted as a starting point of the formation of nanoholes. By the present process, porous anodic zirconia having an ideally ordered array of nanoholes was obtained. The interval between nanoholes in the porous anodic zirconia agreed with the texturing pattern.