Suspended low-loss germanium waveguides for the longwave infrared
Suspended low-loss germanium waveguides for the longwave infrared
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DOI：
10.1364/ol.43.005997
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发表时间：
2018-12-15
期刊：
影响因子：
3.6
通讯作者：
Mashanovich, G. Z.
中科院分区：
文献类型：
--
作者：
Osman, A.;Nedeljkovic, M.;Mashanovich, G. Z.
Ge是中红外(MIR)集成光子学的高兴趣材料，因为它具有互补的金属氧化物半导体(CMOS)兼容性，并且其宽的透明窗口覆盖了2-15微米的光谱区域，分别超过了绝缘体上硅平台和硅材料的4微米和8微米的限制。在这封信中，我们报道了工作在7.67微米的悬浮锗波导，其传输损耗为2.6+/-0.3分贝/厘米。据我们所知，这是第一次在如此长的波长下展示低损耗悬浮锗波导。通过沿着核心形成孔来实现波导的悬浮，从而提供对埋入的氧化层和下面的硅层的访问，以便可以分别使用氢氟酸和四甲基氢氧化铵对它们进行湿法刻蚀。我们的MIR光波导为指纹区域的长波传感开辟了一条新的途径。由光学学会根据知识共享署名4.0许可证的条款出版。
Germanium is a material of high interest for mid-infrared (MIR) integrated photonics due to its complementary metal-oxide-semiconductor (CMOS) compatibility and its wide transparency window covering the 2-15 mu m spectral region exceeding the 4 and 8 mu m limit of the silicon-on-insulator platform and Si material, respectively. In this Letter, we report suspended germanium waveguides operating at a wavelength of 7.67 mu m with a propagation loss of 2.6 +/- 0.3 dB/cm. To the best of our knowledge, this is the first demonstration of low-loss suspended germanium waveguides at such a long wavelength. Suspension of the waveguide is achieved by defining holes alongside the core providing access to the buried oxide layer and the underlying Si layer so that they can be wet etched using hydrofluoric acid and tetramethylammonium hydroxide, respectively. Our MIR waveguides create a new path toward long wavelength sensing in the fingerprint region. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.