Development of The Nano-CMM Probe based on Laser Trapping Technology
Development of The Nano-CMM Probe based on Laser Trapping Technology
复制标题
基于激光捕获技术的纳米CMM探针的研制
DOI:
10.1016/s0007-8506(07)63217-x
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发表时间:
1999
影响因子:
4.1
通讯作者:
Katsumasa Saito
中科院分区:
文献类型:
--
作者:
Y. Takaya;S. Takahashi;T. Miyoshi;Katsumasa Saito