Strain-Induced Back Channel Electron Mobility Enhancement in Poly-Si TFTs Formed by Continuous-Wave Laser Lateral Crystallization

Strain-Induced Back Channel Electron Mobility Enhancement in Poly-Si TFTs Formed by Continuous-Wave Laser Lateral Crystallization
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连续波激光横向结晶形成的多晶硅 TFT 中应变诱导背沟道电子迁移率增强

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发表时间:
2010
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通讯作者:
and Takashi Ito
and Takashi Ito
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作者:
Suntaro Fujii;Shin-Ichiro Kuroki;Koji Kotani;and Takashi Ito

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