Periodic error evaluation system for linear encoders using a homodyne laser interferometer with 10 picometer uncertainty
Periodic error evaluation system for linear encoders using a homodyne laser interferometer with 10 picometer uncertainty
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DOI：
10.1016/j.precisioneng.2017.09.009
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发表时间：
2018-01-01
影响因子：
3.6
通讯作者：
Nakamura, Koutaro
中科院分区：
文献类型：
--
作者：
Hori, Yasuaki;Gonda, Satoshi;Nakamura, Koutaro
研制了一种用于直线光栅尺周期误差的超精密测量系统。我们的系统是基于零差激光干涉仪作为参考尺度。传统的研究，使用的干涉仪与未知的周期性误差导致的可靠性不足，因为周期性误差的干涉仪（PEI）直接重叠的评价PEL。在这项研究中，我们明确揭示了零差干涉仪在拟议的系统具有足够小的PEI小于10 pm。这个PEI是通过分析干扰信号的幅度变化来确定的，我们称之为“自评估方法”。“我们通过对具有亚纳米级PEL的最精确线性编码器之一的实际评估，证明了所提出系统的适用性。
An ultraprecision system to evaluate the periodic error of linear encoders (PEL) has been developed. Our system is based on a homodyne laser interferometer as a reference scale. Conventional studies which used an interferometer with unknown periodic error resulted in insufficient reliability because the periodic error of an interferometer (PEI) directly overlaps on the evaluated PEL. In this study, we explicitly reveal the homodyne interferometer in the proposed system has a sufficiently small PEI of less than 10 pm. This PEI is determined by analyzing the amplitude variation of interference signals, which we refer to as "self-evaluation method." We have demonstrated the applicability of the proposed system through an actual evaluation of one of the most precise linear encoders with a PEL of sub-nanometer order.