All-silicon integrated Fabry-Peacuterot cavity for volume refractive index measurement in microfluidic systems
All-silicon integrated Fabry-Peacuterot cavity for volume refractive index measurement in microfluidic systems
复制标题
DOI：
10.1063/1.3152286
复制
发表时间：
2009-06-15
影响因子：
4
通讯作者：
Peter, Y. -A.
中科院分区：
文献类型：
--
作者：
St-Gelais, R.;Masson, J.;Peter, Y. -A.
我们报道了一种基于垂直刻蚀硅布拉格反射器的折射率（RI）传感器。该设备是强大的，并通过几十微米的液体进行测量。灵敏度为907 nm/RIU（RI单位），分辨率为1.7 × 10 ~（-5）RIU，与光学模拟结果吻合较好。该分辨率是与微流体系统集成的体积RI传感器的最高报告。该传感器在单细胞表征和基于芯片的液相色谱领域的预期应用进行了讨论。
We report a refractive index (RI) sensor based on the use of vertically etched silicon Bragg reflectors. The device is robust and performs measurements through tens of micrometers of liquid. A sensitivity of 907 nm/RIU (RI units) and a resolution of 1.7x10(-5) RIU are obtained and are in good agreement with optical simulations. This resolution is the highest reported for a volume RI sensor integrated with a microfluidic system. Expected applications for the sensor in the fields of single cell characterization and chip based liquid chromatography are discussed.