High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments
High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments
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DOI：
10.1016/j.jhazmat.2020.122486
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发表时间：
2020-07-15
影响因子：
13.6
通讯作者：
Nam-Trung Nguyen
中科院分区：
文献类型：
--
作者：
Hoang-Phuong Phan;Toan Dinh;Nam-Trung Nguyen
凭借其前所未有的传统刚性平台特性，柔性电子产品在过去十年中一直是一个重要的研究课题，提供了广泛的应用，从可弯曲显示器，柔性太阳能系统，到用于健康监测的软可折叠设备。用于恶劣和危险环境的柔性电子产品也得到了广泛的研究。特别是，具有拉伸能力和弯曲能力以及耐受极端和有毒操作条件的装置是必要的。这项工作提出了碳化硅生长在硅上，然后转移到聚酰亚胺衬底作为一个新的平台，灵活的传感器的恶劣环境。结合SiC优异的电气性能和聚酰亚胺的耐高温性能，我们首次展示了可以在400摄氏度以上工作的柔性SiC传感器。这种新的传感平台为危险环境中的灵活传感应用提供了令人兴奋的机会。
With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 degrees C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.