Characterization and modeling of silicon integrated spiral inductors for high-frequency applications
Characterization and modeling of silicon integrated spiral inductors for high-frequency applications
复制标题
适用于高频应用的硅集成螺旋电感器的表征和建模
DOI：
10.1007/s10470-007-9063-7
复制
发表时间：
2007
影响因子：
1.4
通讯作者：
G. Palmisano
中科院分区：
文献类型：
--
作者：
T. Biondi;A. Scuderi;E. Ragonese;G. Palmisano
本文介绍了0.3至0.8 nH的径向图案化的接地屏蔽圆形电感的表征和建模的硅双极技术的RF应用。首先考虑到校准和去嵌入问题的测量精度的广泛验证。提出了一种新的五步去嵌入技术，以提高小电感测量的准确性。在0.3-0.8 nH的范围内的去嵌入实验数据的准确性证明通过比较测量的低频电感与一个大的电感器的电磁模拟。基于电磁仿真和实验测量，著名的圆形螺旋电流片的表达式进行了修订和修改，以提高其准确性在较低的电感值。所提出的表达式也扩展到电感器的多边形几何形状，显示出显着的改进，相对于国家的最先进的。最后，原来的和修改后的表达式中采用的硅螺旋电感器的集总可扩展模型。与实测数据的比较表明，修改后的表达式允许误差减少高达20%，相对于原来的，电感和品质因数模拟。
This paper presents the characterization and modeling of 0.3- to 0.8-nH radial patterned ground shield circular inductors fabricated in a silicon bipolar technology for RF applications. An extensive validation of measurement accuracy is first addressed taking into account both calibration and de-embedding issues. A novel five-step de-embedding technique is also proposed to improve the accuracy of small inductor measurements. The accuracy of de-embedded experimental data in the range 0.3-0.8 nH is demonstrated by comparing the measured low-frequency inductance with electromagnetic simulations of a large set of inductors. Based on both electromagnetic simulations and experimental measurements, the well-known current sheet expression for circular spirals is revised and modified to improve its accuracy at lower inductance values. The proposed expression is also extended to inductors with polygonal geometries showing significant improvements with respect to the state-of-the-art. Finally, the original and modified expressions are employed in a lumped scalable model for silicon spiral inductors. Comparisons with measured data revealed that the modified expression allows error reductions as large as 20% with respect to the original one, on both inductance and quality factor simulations.