Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications
Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications
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DOI：
10.1088/0741-3335/47/12b/s07
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发表时间：
2005-12-01
影响因子：
2.2
通讯作者：
Park, SJ
中科院分区：
文献类型：
--
作者：
Eden, JG;Park, SJ
将低温、非平衡等离子体限制在特征空间尺寸小于 1 毫米的空腔中，为等离子体科学的研究提供了新的途径。现在不仅可以访问以前未探索的参数空间区域，而且等离子体与其材料边界的相互作用也提出了令人着迷的问题和机遇。其他引人注目的科学问题包括尺度关系和高压环境中普遍存在的碰撞过程。这里简要描述了微等离子体的一般特征以及一些新兴应用。对于后者，重点将放在光子学上，特别是硅中微腔等离子体器件的大型（500 x 500）阵列的演示，微等离子体在可见光、近红外和紫外线中的光电探测的观察，以及陶瓷结构中微等离子体线性阵列的蓝色光学增益（λ类似于460 nm）的测量。
The confinement of low temperature, non-equilibrium plasmas to cavities having characteristic spatial dimensions < 1 mm is providing new avenues of inquiry for plasma science. Not only is a previously unexplored region of parameter space now accessible, but the interaction of the plasma with its material boundaries raises fascinating questions and opportunities. Other scientific issues that come to the fore include scaling relationships and the collisional processes that become prevalent in a high pressure environment. The general characteristics of microplasmas, as well as several emerging applications, are briefly described here. With regard to the latter, emphasis will be placed on photonics and, specifically, the demonstration of large (500 x 500) arrays of microcavity plasma devices in Si, the observation of photodetection in the visible, near-infrared and ultraviolet by a microplasma, and the measurement of optical gain in the blue (lambda similar to 460 nm) from a linear array of microplasmas in a ceramic structure.