Simultaneous measurement of gas concentration and temperature by the ball surface acoustic wave sensor
Simultaneous measurement of gas concentration and temperature by the ball surface acoustic wave sensor
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DOI：
10.7567/jjap.56.07jc04
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发表时间：
2017-06
影响因子：
1.5
通讯作者：
K. Yamanaka;S. Akao;N. Takeda;T. Tsuji;T. Oizumi;Y. Tsukahara
中科院分区：
文献类型：
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作者：
K. Yamanaka;S. Akao;N. Takeda;T. Tsuji;T. Oizumi;Y. Tsukahara
我们开发了一种具有非晶二氧化硅敏感膜的球形表面声波（SAW）痕量水分传感器，并实现了从0.017 ppmv [霜点（FP）为−99 °C]到6.0 × 103 ppmv（0 °C FP）的宽范围测量。然而，由于传感器的灵敏度取决于温度，当温度大幅变化时，测量结果会受到干扰。为了克服这个问题，我们开发了一种方法，同时测量温度和气体浓度使用球SAW传感器。温度和浓度是通过求解两个频率下延迟时间变化的方程得出的。当温度有一个大的跳跃，延迟时间的变化显着干扰，但水的浓度几乎是正确的测量，通过补偿灵敏度的变化，使用测量的温度。由球SAW传感器测量的温度也将用于控制球温度。这种方法将使球SAW传感器在不同温度的环境中可靠。
We have developed a ball surface acoustic wave (SAW) trace moisture sensor with an amorphous silica sensitive film and realized wide-range measurement from 0.017 ppmv [a frost point (FP) of −99 °C] to 6.0 × 103 ppmv (0 °C FP). However, since the sensitivity of the sensor depends on the temperature, measurement results are disturbed when the temperature largely changes. To overcome this problem, we developed a method to simultaneously measure temperature and gas concentration using a ball SAW sensor. Temperature and concentration is derived by solving equations for the delay time change at two frequencies. When the temperature had a large jump, the delay time change was significantly disturbed, but the water concentration was almost correctly measured, by compensating the sensitivity change using measured temperature. The temperature measured by a ball SAW sensor will also be used to control the ball temperature. This method will make a ball SAW sensor reliable in environments of varying temperatures.