Electromechanical Coupling and Frequency Characteristics of a Quartz Crystal Resonator Covered With Micropillars
Electromechanical Coupling and Frequency Characteristics of a Quartz Crystal Resonator Covered With Micropillars
复制标题
微柱覆盖石英晶体谐振器的机电耦合和频率特性
DOI：
10.1115/1.4042936
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发表时间：
2019-08-01
影响因子：
1.7
通讯作者：
Wu, Zeyan
中科院分区：
文献类型：
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作者：
Xie, Xuan;Xie, Jiemin;Wu, Zeyan
近年来，一些研究者研究了覆盖有微柱的石英晶体谐振器（QCR）的频率特性，以测量微柱的物理和几何参数。最近的一项研究表明，与传统的QCR传感器相比，QCR柱装置可以大大提高灵敏度。在本研究中，我们利用传输线模型，分别以电导分析与小负载近似，计算出覆盖微柱的QCR的频率与频宽偏移。数值结果表明，当柱体高度接近临界高度时，QCR的频率和带宽漂移发生了显著变化，表明存在耦合共振。两个结果拟合得很好，除了共振点附近的小载荷近似不成立。只要频移很小，小负载近似是相当简单和有效的。电导分析相对复杂，但可以处理任何情况。本研究的结果有助于微/纳米线表征和进一步改进QCR柱器件的各种应用，如生物化学传感器。
Recently, some researchers have studied the frequency characteristics of a quartz crystal resonator (QCR) covered with micropillars to measure the physical and geometric parameters of the micropillars. A recent study showed that the QCR-pillars device can greatly enhance the sensitivity when compared with conventional QCR sensors. In this research, we calculate the frequency and bandwidth shift of a QCR covered with micropillars based on the transmission line model with conductance analysis and small-load approximation, respectively. Numerical results showed that the frequency and bandwidth shift of QCR changed significantly when the height of the pillar approaches the critical height, which implies the coupled resonance. Two results fit very well except for the neighborhood of resonance point where the small-load approximation does not hold. The small-load approximation is quite simple and efficient as long as the frequency shift is small. The conductance analysis is relatively complicated but can deal with any case. The outcomes of this research are helpful for micro/nanowires characterization and further improvement of QCR-pillars devices for various applications such as biochemical sensors.