Liquid Metal-Based Flexible Band-Stop Frequency Selective Surface

Liquid Metal-Based Flexible Band-Stop Frequency Selective Surface
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DOI:
10.1109/mems51782.2021.9375361
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发表时间:
2021-01
期刊:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子:
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通讯作者:
A. Mitra;Kevin Xu;S. Babu;Jun H. Choi;Jeong‐Bong Lee
A. Mitra;Kevin Xu;S. Babu;Jun H. Choi;Jeong‐Bong Lee
中科院分区:
其他
文献类型:
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作者:
A. Mitra;Kevin Xu;S. Babu;Jun H. Choi;Jeong‐Bong Lee

文献摘要

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我们报告的设计,制造和表征的PDMS封装的物理柔性(可弯曲,可折叠)镓基液体金属带阻频率选择表面。设计了一种工作在X波段(7~ 11.2GHz)的带阻频率选择表面(FSS)。将液态金属嵌入到从深蚀刻的Si模具复制的PDMS微流体通道中。在低温(10 K)下的超低压(5.75 x 10-6 Torr)真空用于液体金属的清洁封装。制作了一个5 × 5的FSS阵列。在波导环境中进行了表征所制造的FSS。模拟和测量的带阻频率选择表面响应的S参数值显示出良好的一致性。
We report the design, fabrication, and characterization of PDMS encapsulated physically flexible (bendable, foldable) gallium-based liquid metal band-stop frequency selective surface. A band-stop frequency selective surface (FSS) with targeted operation in the X-band (7~11.2 GHz) was designed. Liquid metal was embedded in PDMS microfluidic channels replicated from a deep etched Si mold. Ultra-low pressure (5.75 x 10-6 Torr) vacuum at cryogenic temperatures (10 K) was employed for clean encapsulation of liquid metal. An array of 5 x 5 FSS has been fabricated. Characterization of the fabricated FSS was carried out in a waveguide environment. The S-parameter values of the simulated and measured band-stop FSS response showed an excellent agreement.