S.Aritome, M.Morita and M.Hirose: "Low-Temperature Nitridation of Fluorinated Oxide" Extended Abstract of the 17th Conference on Solid State Devices and Materials. 17. 279-282 (1985)
S.Aritome, M.Morita and M.Hirose: "Low-Temperature Nitridation of Fluorinated Oxide" Extended Abstract of the 17th Conference on Solid State Devices and Materials. 17. 279-282 (1985)
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S.Aritome、M.Morita 和 M.Hirose:“氟化氧化物的低温氮化”第 17 届固态器件和材料会议的扩展摘要。
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