Consequences of three-dimensional physical and electromagnetic structures on dust particle trapping in high plasma density material processing discharges
Consequences of three-dimensional physical and electromagnetic structures on dust particle trapping in high plasma density material processing discharges
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三维物理和电磁结构对高等离子体密度材料加工放电中粉尘颗粒捕集的影响
DOI：
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发表时间：
1998
期刊：
影响因子：
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通讯作者：
M. Kushner
中科院分区：
文献类型：
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作者：
H. Hwang;E. Keiter;M. Kushner
等离子体处理放电的典型设计目标是对衬底具有均匀的反应物通量和最小的晶圆片灰尘颗粒污染。然而，反应器具有三维（3D）结构的情况并不少见，例如天线（或线圈）、气体喷射喷嘴、亚晶圆或超晶圆形貌以及单面泵口。这些结构会导致反应物通量的方位不对称。这些结构也可能产生粉尘颗粒收集器。本文采用三维等离子体设备模型，研究了在电感耦合射频放电中，这些结构对反应物通量的影响，以及它们对尘埃颗粒捕获的影响。我们发现，三维结构，如注入喷嘴，扰动等离子体电位和离子通量的距离远远超出其几何边界。这些扰动足以产生尘粒陷阱。电磁asymmetr……
Plasma processing discharges are typically designed with the goal of having uniform reactant fluxes to the substrate and a minimum of dust particle contamination of the wafer. It is not uncommon, however, that reactors have three-dimensional (3D) structures such as antennas (or coils), gas injection nozzles, sub- or super-wafer topography and single-sided pump ports. These structures can contribute to azimuthal asymmetries in reactant fluxes. These structures may also produce dust particle traps. In this paper, a 3D plasma equipment model is applied to investigate the impact of these structures on reactant fluxes and their influence on dust particle trapping in inductively coupled radio frequency discharges under conditions where trapping is not typically obtained. We find that 3D structures, such as injection nozzles, perturb the plasma potential and ion fluxes to distances well beyond their geometrical boundaries. These perturbations are sufficient to create dust particle traps. Electromagnetic asymmetr...