Akitomo Tachibana: "Chemical Mechanism for pーDoping Effects on Silicon Etching Reaction by Fluorine" Journal of Physical Chemistry.
Akitomo Tachibana: "Chemical Mechanism for pーDoping Effects on Silicon Etching Reaction by Fluorine" Journal of Physical Chemistry.
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Akitomo Tachibana:“p 掺杂对氟硅蚀刻反应影响的化学机制”物理化学杂志。
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