Three-dimensional measurements of UV-imprint process by micro- digital Holographic-PTV
Three-dimensional measurements of UV-imprint process by micro- digital Holographic-PTV
复制标题
利用微型数字全息 PTV 进行 UV 压印工艺的三维测量
DOI:
10.1016/j.mee.2012.04.010
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发表时间:
2012
影响因子:
2.3
通讯作者:
Noriyuki Unno
中科院分区:
文献类型:
--
作者:
Shin-ichi Satake;Jun Taniguchi;Takahiro Kanai;Noriyuki Unno