Multi-directional micro-switching valve chip with rotary mechanism
Multi-directional micro-switching valve chip with rotary mechanism
复制标题
DOI：
10.1016/j.sna.2007.10.082
复制
发表时间：
2008-05-16
影响因子：
4.6
通讯作者：
Ikuta, Koji
中科院分区：
文献类型：
--
作者：
Hasegawa, Tadahiro;Nakashima, Kenichiro;Ikuta, Koji
This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding. (c) 2007 Elsevier B.V. All rights reserved.
