On-Wafer Measurement of Pseudo Differential Transmission Line for Global Interconnect in Si LSI,
On-Wafer Measurement of Pseudo Differential Transmission Line for Global Interconnect in Si LSI,
复制标题
用于 Si LSI 中全局互连的伪差分传输线的晶圆上测量,
DOI:
--
复制
发表时间:
2005
期刊:
影响因子:
--
通讯作者:
and K. Masu
中科院分区:
文献类型:
--
作者:
H. Sugita;H. Ito;S. Gomi;K. Okada;and K. Masu