In situ observation of solidification behavior of Si melt dropped on Si wafer by IR thermography
In situ observation of solidification behavior of Si melt dropped on Si wafer by IR thermography
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红外热成像原位观察硅熔体滴在硅片上的凝固行为
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
K. Kuribayashi
中科院分区:
文献类型:
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作者:
K. Nagashio;H. Murata;K. Kuribayashi