Laser microprocessing of metal surfaces using a tightly focused radially polarized beam
Laser microprocessing of metal surfaces using a tightly focused radially polarized beam
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DOI：
10.1364/ol.405852
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发表时间：
2020-11-15
期刊：
影响因子：
3.6
通讯作者：
Sato, Shunichi
中科院分区：
文献类型：
--
作者：
Kozawa, Yuichi;Sato, Masaki;Sato, Shunichi
径向偏振光束的紧密聚焦用于金属的单次激光烧蚀。强的纵向场产生的焦点，并全面检查各种金属材料的烧蚀过程中的贡献。在焦点处存在纵向场的情况下，在表面处制造的弹坑根据材料表现出斑点形状或甜甜圈形状。实验结果表明，金属表面强纵向电场具有促进材料去除的作用，为提高超快激光微细加工的空间分辨率提供了一种新的加工方案. (C)2020美国光学学会
Tight focusing of a radially polarized beam is used for single shot laser ablation of metals. The strong longitudinal field is generated at the focus, and its contribution to the ablation process is comprehensively examined for various metal materials. In the presence of the longitudinal field at the focus, a fabricated crater at the surface exhibits either a spot shape or a doughnut shape, depending on the material. The experimental results indicate that the strong longitudinal electric field on metal surf-aces is capable of promoting material removal, which may provide a novel processing scheme in ultrafast laser microprocessing with enhanced spatial resolution. (C) 2020 Optical Society of America