Simulation studies on nonlinear dynamics and chaos in a MEMS cantilever control system
Simulation studies on nonlinear dynamics and chaos in a MEMS cantilever control system
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DOI：
10.1088/0960-1317/14/7/029
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发表时间：
2004-07
影响因子：
2.3
通讯作者：
S. Liu;A. Davidson;Qiao Lin
中科院分区：
文献类型：
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作者：
S. Liu;A. Davidson;Qiao Lin
我们发现，在一个模拟的MEMS悬臂梁系统的静电传感和驱动，旨在为基于MEMS的大容量存储芯片，有和没有伺服控制的周期加倍和混沌。我们使用图形界面的庞加莱映射方法，使我们能够同时模拟多个初始条件。研究了微机械悬臂梁系统在弱扰动和强扰动下的静态和动态不稳定性。在无扰动的悬臂梁闭环控制系统中，我们观察到了双稳定性和Hopf分岔。仿真了系统在弱扰动作用下的环路增益和相位裕度。此外，我们还发现了悬臂梁开环和闭环系统在强扰动作用下的倍周期、混沌和奇异吸引子。对于一种情况下，稳定的操作范围显着减少了25%，因为一个混乱的响应。
We discovered period doubling and chaos in a simulated MEMS cantilever system with electrostatic sensing and actuation, intended for a MEMS based mass storage chip, with and without servo control. We used a graphical interface for a Poincaré map method that allowed us to simulate multiple initial conditions simultaneously. We investigated both the static and dynamic instabilities of the MEMS cantilever system subjected to weak and strong disturbances. We observed bistability and a Hopf bifurcation in the closed loop controlled cantilever system without disturbances. We simulated the loop gain and the phase margin when the system was subjected to weak disturbances. Furthermore, we have found the period doubling, chaos and strange attractors for both the open and closed loop cantilever systems subjected to strong disturbances. For one case the stable operation range is significantly reduced by 25% because of a chaotic response.