A novel thick-film ceramic humidity sensor
A novel thick-film ceramic humidity sensor
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DOI：
10.1016/s0925-4005(97)80258-4
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发表时间：
1997-05
影响因子：
8.4
通讯作者：
W. Qu;J. Meyer
中科院分区：
文献类型：
--
作者：
W. Qu;J. Meyer
本文介绍了基于半导体金属氧化物 MnWO4 的厚膜湿度传感器的制造和表征的研究结果。该传感器元件采用新颖的“三明治”结构，其中 40 μm 多孔 MnWO4 陶瓷层夹在两个 10 μm 极性反转、叉指金属膜之间。使用氯化锂粉末代替传统的玻璃熔块作为粘合促进剂来烧结传感器浆料。采用该方法，平均粒径为3.0μm的MnWO4粉末在850℃的标准厚膜烧成温度下烧结。烧结陶瓷层呈现多孔结构。这种新颖的电极布置结合了并联电容器形式的湿度传感器和叉指电容器形式的湿度传感器的优点，允许高灵敏度和快速响应。温度对传感器特性的影响已通过集成厚膜 NTC 电阻器得到补偿。湿度传感器对有机蒸汽没有交叉敏感性。通过在基板背面印制刷新加热器将传感器元件加热到约 400°C，可以烧掉传感器表面上的有机污染物。
The paper describes the results of studies on the fabrication and characterisation of a thick-film humidity sensor based on the semiconducting metal oxide MnWO4. The sensor element possesses a novel ‘sandwich’-configuration with a 40 μm porous MnWO4ceramic layer sandwiched by two 10 μm polarity-reversed, interdigitated metal films. Instead of traditional glass frits, LiCl powders are used as adhesion promoters for sintering the sensor paste. With this method, MnWO4powders with an average particle size of 3.0 μm are sintered at the standard thick-film firing temperature of 850°C. The sintered ceramic layer exhibits a porous structure. The novel electrode arrangement combines the advantages of humidity sensors in the form of a parallel capacitor with those in the form of an interdigital capacitor, permitting a high sensitivity and a fast response. The influence of temperature on the sensor characteristics has been compensated for by integrating a thick-film NTC resistor. The humidity sensor shows no cross-sensitivity to organic vapour. The organic contamination on the sensor surface can be burned out by heating the sensor element at about 400°C with the refresh heater printed on the back side of the substrate.