Displacement measuring interferometer for sub-nano meter resolution
Displacement measuring interferometer for sub-nano meter resolution
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亚纳米级分辨率的位移测量干涉仪
DOI：
10.1016/j.measen.2021.100336
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
M.
中科院分区：
文献类型：
--
作者：
Higuchi;M.;Wei;D.;Aketagawa;M.
本文讨论了采用正弦相位调制干涉仪和改进型锁相环的位移测量系统。改进型锁相环是为提高正弦相位调制干涉仪的分辨率而专门研制的锁相环。在0.1nm的1Hz的步进位移下，系统的电流分辨率小于亚纳米量级。
In this presentation, the displacement measurement system using sinusoidal phase modulation interferometer and modified phase-locked loop is discussed. The modified phase-locked loop is specially developed phase-locked loop for sinusoidal phase modulation interferometer for improving the resolution. The 0.1 nm step displacement with 1 Hz results that the current resolution of the system is less than sub-nano meter order.