Anisotropy modulations of femtosecond laser pulse induced periodic surface structures on silicon by adjusting double pulse delay.
Anisotropy modulations of femtosecond laser pulse induced periodic surface structures on silicon by adjusting double pulse delay.
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DOI：
10.1364/oe.22.015820
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发表时间：
2014-06
期刊：
影响因子：
3.8
通讯作者：
W. Han;Lan Jiang;Xiaowei Li;Qingsong Wang;H. Li;Y. Lu
中科院分区：
文献类型：
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作者：
W. Han;Lan Jiang;Xiaowei Li;Qingsong Wang;H. Li;Y. Lu
我们证明了可以通过设计飞秒激光脉冲串（800 nm, 50 fs, 1 kHz）来调节硅上激光诱导周期表面结构（LIPSS）的极化相关各向异性。通过在双脉冲序列中改变脉冲延迟100 ~ 1600 fs，降低沉积的脉冲能量，从而减弱了基于初始形成波纹结构的定向表面等离子体极化(SPP)-激光能量耦合，使偏振相关的LIPSS几何形态从几乎各向同性的圆形演变为稍微拉长的椭圆形状。同时，在一定的脉冲延迟和扫描速度的基础上，实现了二维扫描线宽度在不同方向上的可控各向异性。这可以有效地实现对大面积均匀LIPSS地层的更好控制。作为实例，我们进一步证明了在不同的脉冲延迟下，不同的扫描时间可以形成大面积的LIPSS。
We demonstrate that the polarization-dependent anisotropy of the laser-induced periodic surface structure (LIPSS) on silicon can be adjusted by designing a femtosecond laser pulse train (800 nm, 50 fs, 1 kHz). By varying the pulse delay from 100 to 1600 fs within a double pulse train to reduce the deposited pulse energy, which weakens the directional surface plasmon polarition (SPP)-laser energy coupling based on the initial formed ripple structure, the polarization-dependent geometrical morphology of the LIPSS evolves from a nearly isotropic circular shape to a somewhat elongated elliptical shape. Meanwhile, the controllable anisotropy of the two-dimensional scanned-line widths with different directions is achieved based on a certain pulse delay combined with the scanning speed. This can effectively realize better control over large-area uniform LIPSS formation. As an example, we further show that the large-area LIPSS can be formed with different scanning times under different pulse delays.