The Effect of Cr Addition on the Properties of Graphite-Like Carbon Film
The Effect of Cr Addition on the Properties of Graphite-Like Carbon Film
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Cr添加量对类石墨碳膜性能的影响
DOI：
10.1166/jnn.2016.13658
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发表时间：
2016-12
影响因子：
--
通讯作者：
Shihong Zhang
中科院分区：
文献类型：
--
作者：
Yue Lin;Shihong Zhang
本研究采用非平衡磁控溅射技术在Si和高速钢基体上沉积了不同Cr靶功率的类石墨碳（GLC）薄膜，以研究Cr掺杂对GLC薄膜的影响。通过拉曼光谱、X射线光电子能谱（XPS）和透射电子显微镜（TEM）对键结构进行了表征。分别通过纳米压痕和钉盘实验研究了薄膜的机械和摩擦学行为。结果表明，Cr元素在薄膜中以Cr3C2相的形式存在，促进了sp 3 键的形成。同时，发现合适的Cr靶功率为0.1 kW有利于获得最佳的表面质量、最高的硬度和最低的摩擦系数，而进一步增加Cr靶功率会得到不希望的结果。
Graphite-like carbon (GLC) films with different Cr target powers were deposited on Si and high speed steel substrates by the unbalanced magnetron sputtering technique to investigate the influence of Cr doping into GLC films in this study. The bond structure was characterized by Raman spectra, X-ray photoelectron spectroscopy (XPS) and transmission electron microscope (TEM). The mechanical and tribological behaviors of the films were studied by conducting nano-indentation and pin-on-disc experiments, respectively. The results showed that Cr elements existed in the form of Cr3C2 phase in the film, which promoted the formation of sp 3 bonds. Meanwhile, the proper Cr target power of 0.1 kW was found to facilitate the best surface quality, highest hardness and lowest friction coefficient, while further increasing the Cr target power would obtain a undesired result.