Vibration-compensated interferometer for measuring cryogenic mirrors
Vibration-compensated interferometer for measuring cryogenic mirrors
复制标题
用于测量低温反射镜的振动补偿干涉仪
DOI：
10.1117/12.369217
复制
发表时间：
1999
期刊：
影响因子：
1.9
通讯作者：
J. Burge
中科院分区：
文献类型：
--
作者：
Chunyu Zhao;J. Burge
研制了一种在低温下测量大型反射镜的先进干涉仪。该仪器使用主动控制来补偿振动的影响，从而实现高分辨率的相移干涉测量。数字信号处理器和来自电光调制器的高速相位控制允许在4000赫兹进行相位测量。这些测量被反馈到DSP中的实时伺服，该伺服为以视频速率进行的表面测量提供经振动校正的相位斜坡。该仪器计划集成在NASA马歇尔太空飞行中心的X射线校准设备中，用于测量40K下的NGST反射镜。
An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.