Water Adsorption on MEMS Surface Studied by Quartz Crystal Microbalance
Water Adsorption on MEMS Surface Studied by Quartz Crystal Microbalance
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石英晶体微天平研究MEMS表面的水吸附
DOI：
10.1007/978-94-011-5646-2_44
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
N. Ohmae
中科院分区：
文献类型：
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作者：
N. Ohmae
对于 MEMS 或微型机器，相对表面的原子位置足够近，可以彼此相互作用，微摩擦学是确保 MEMS 功能、可靠性和长寿命的关键技术。 MEMS 微摩擦学的特点是小质量的小型微部件在极轻负载下的相对运动，在这种情况下，界面力而不是体力至关重要[1, 2]。当 MEMS 在普通大气中使用时，水分子的吸附是影响其正常运行的最麻烦的障碍之一。吸附的水分子 [3] 产生的强静摩擦力会产生足够的阻力来停止相对运动。 Bhushan 展示了不同水平的界面液体模型[4]。 Binggeli 和 Mate 研究了水蒸气对纳米摩擦学的影响[5, 6]。然而，所吸附的水分子的厚度例如在相对湿度50％的条件下约为四层或五层。因此，应该更精细地研究水分子在聚合物上的吸附行为。
With MEMS or micromachines, where atoms of opposing surfaces locate close enough to interact one another, microtribology is a key technology which ensures functioning, reliability and long life of MEMS. Microtribology of MEMS is characterized by a relative motion of small microcomponents with small masses under very light loads, in which cases interfacial forces are essential rather than body forces[1, 2]. Adsorption of water molecules is one of the most troublesome impediments to proper functioning when MEMS is used in an ordinary atmosphere. Strong stiction due to adsorbed water molecules[3] causes enough resistance to stop relative motions. Bhushan showed a model of interfacial liquid with different levels [4]. Binggeli and Mate studied the influence of water vapor on nanotribology[5, 6]. However, the thickness of adsorbed water molecules, for example, in conditions of 50% relative humidity is about four or five layers. Therefore, adsorption behavior of water molecules on polymers should be studied on a finer scale.
DOI：
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发表时间：
2016
期刊：
影响因子：
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作者：
顧文てい;井櫻勝吾;西久保綾佑;佐伯昭紀;Hitoshi Washizu
通讯作者：
Hitoshi Washizu