A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process
A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process
复制标题
无万向节两轴静电扫描仪，具有倾斜固定垂直梳和通过微组装工艺串联的弹簧
DOI：
10.1088/0960-1317/24/9/095008
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发表时间：
2014
影响因子：
2.3
通讯作者：
Jong
中科院分区：
文献类型：
--
作者：
Min;Seunghwan Moon;B. Lee;Jong
我们提出了一种无万向节的双轴静电微机电系统（MEMS）扫描器与倾斜的固定垂直梳（TSVC）通过微组装工艺制造。无万向节的双轴扫描仪具有尺寸紧凑的优点，并且也不需要任何用于电隔离的附加制造工序。TSVC和耦合弹簧（T形弹簧和折叠弹簧）允许镜面扫描器以大扫描角度绕两个轴旋转。所提出的扫描器的制造步骤可以显着减少通过采用微组装工艺，因为没有必要进行多步蚀刻工艺的两个垂直梳之间的高度偏移。研究发现，折叠弹簧和T形弹簧的宽度分别决定了快轴和慢轴的共振频率。通过建立TSVC电容随转角（θ）变化的数学模型，引入有效倾角（ETA）作为TSVC的设计准则，确定TSVC的工作范围。在准静态工作模式下，慢轴在90 V时的光学扫描角最大为7.8°;在谐振模式下，快轴在100 V时的光学扫描角最大为17.3°。所制造的扫描器可用于各种内窥镜光学应用。
We propose a gimbal-less two-axis electrostatic microelectromechanical system (MEMS) scanner with tilted stationary vertical combs (TSVCs) fabricated via a microassembly process. The gimbal-less two-axis scanner has the advantage of being of a compact size and also does not need any additional fabrication sequence for electrical isolation. The TSVCs and coupled springs (T-shaped springs and folded springs) allow the mirror scanner to rotate around two axes with a large scanning angle. The fabrication steps for the proposed scanner can be remarkably reduced by employing a microassembly process, as there is no need to conduct a multistep etching process for height offset between two vertical combs. It was found that the width of the folded spring and the T-shaped spring dominated the resonant frequency of the fast axis and the slow axis, respectively. By modeling the capacitance change of TSVCs with respect to the rotational angle (θ), the effective tilted angle (ETA), as a new design criterion, was introduced to determine an adequate operation range. The optical scanning angle of the fabricated scanner was up to 7.8° at 90 V for the slow axis in quasistatic mode and up to 17.3° at 100 V for the fast axis in resonant mode at 2.84 kHz. The fabricated scanner can be used for various endoscopic optical applications.