Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer
Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer
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微型质谱仪离子源三极管电子发射器的制作与操作
DOI：
10.1116/1.2835065
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
Soonil Lee
中科院分区：
文献类型：
--
作者：
J. Cho;H. Yoon;Sangsik Yang;K. Koh;Soonil Lee
质谱仪的小型化应该会加强它们在许多应用中的用处，只要保持足够的性能。然而，使用激光电离或传统的长丝电离源严重阻碍了质谱仪的小型化，而使用碳纳米颗粒（CNP）薄膜阴极的三极管电子发射器为实现微型质谱仪开辟了新的途径，因为使用传统的光刻工艺可以制造足够小的离子源。
The miniaturization of mass spectrometers should strengthen their usefulness in many applications as long as adequate performance is preserved. However, the use of laser-ionization or conventional filament-ionization sources severely hampered miniaturization of mass spectrometers, whereas triode electron emitters with carbon nanoparticle (CNP) film cathodes opened a new path towards realization of micro mass spectrometer since the fabrication of sufficiently small ion sources became possible using a conventional photolithography process.