A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe
A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe
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DOI：
10.3390/app9030454
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发表时间：
2019-01
期刊：
影响因子：
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通讯作者：
Chong Chen;R. Sato;Y. Shimizu;Taku Nakamura;H. Matsukuma;W. Gao
中科院分区：
文献类型：
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作者：
Chong Chen;R. Sato;Y. Shimizu;Taku Nakamura;H. Matsukuma;W. Gao
提出了一种利用锁模飞秒激光光源扩展光纤双探测器彩色共焦探头Z向测量范围的方法。在双探测器彩色共焦探头中，测量目标的Z向位移是从由两个相同的光纤探测器获得的两个光强度的归一化强度比中的峰值波长推导出来的。本文提出了一种利用归一化光强比Ia和反向归一化光强比In得到的轴向响应的主瓣和副瓣的新方法，即Ia的逆归一化光强比，以获得测量目标的峰值波长与Z向位移之间的无缝关系。通过理论计算和实验研究，验证了所提出的量程扩展方法的可行性。
A method is proposed to expand the Z-directional measurement range of a fiber-based dual-detector chromatic confocal probe with a mode-locked femtosecond laser source. In the dual-detector chromatic confocal probe, the Z-directional displacement of a measurement target is derived from the peak wavelength in the normalized intensity ratio from the two light intensities obtained by the two identical fiber detectors. In this paper, a new method utilizing the main-lobe and side-lobes of axial responses acquired from both the normalized intensity ratio Ia and the invert normalized intensity ratio In, which is the inverse of Ia, is proposed to obtain the seamless relationship between the peak wavelength and the Z-directional displacement of a measurement target. Theoretical calculations and experimental investigation are carried out to demonstrate the feasibility of the proposed measurement range expansion method.