Magnetocaloric cooling of a thermally-isolated microstructure
Magnetocaloric cooling of a thermally-isolated microstructure
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DOI：
10.1088/0960-1317/22/9/094008
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发表时间：
2012-09
影响因子：
2.3
通讯作者：
T. Tsukamoto;M. Esashi;Shuji Tanaka
中科院分区：
文献类型：
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作者：
T. Tsukamoto;M. Esashi;Shuji Tanaka
固态微磁制冷机因其效率高、结构简单等优点，在冷却微器件方面具有一定优势。在这项研究中，我们演示了热隔离微结构的实际冷却，这是SSMMR的主要组成部分，通过磁热效应。隔热结构由聚对二甲苯大高径比梁组成，既具有高隔热性能，又具有高刚度。设计并制作了磁场开关，将磁通密度从0T控制到1T左右，在此磁通密度变化下，最大温度变化为1.0°C。
A solid-state micro magnetic refrigerator (SSMMR) has some advantages to cool microdevices because of its high efficiency and simple structure. In this study, we demonstrated the actual cooling of a thermally-isolated microstructure, which is a main component of the SSMMR, by the magnetocaloric effect. The thermal isolation structure is composed of parylene high-aspect-ratio beams for both high thermal isolation and high stiffness. A magnetic field switch was designed and fabricated to control the magnetic flux density from 0 T to about 1 T. Under this magnetic flux density change, the maximum temperature change of 1.0 °C was confirmed.