Tuning of Interval in Nanohole Array of Anodic Porous Alumina through Deformation of Polymer Templates
Tuning of Interval in Nanohole Array of Anodic Porous Alumina through Deformation of Polymer Templates
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通过聚合物模板的变形调节阳极多孔氧化铝纳米孔阵列的间距
DOI：
10.1039/c7ra08346g
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
and Hideki Masuda
中科院分区：
文献类型：
--
作者：
Toshiaki Kondo;Sanami Nagao;Takashi Yanagishita;and Hideki Masuda
本文介绍了一种基于聚合物模板的变形和随后的金属模具的形成来制备具有所需孔间距的理想有序阳极多孔氧化铝的新型工艺。在该方法中，首先通过使用起始金属（Ni）模具压印在聚合物片材上制备由有序阵列的凹结构组成的图案，并且通过聚合物片材的变形来调整图案中的间隔。通过使用聚合物片作为模板电镀Ni来形成具有调整间隔的图案的Ni模具。最后，通过压印使用所获得的Ni模具和随后的阳极氧化的Al的预织构产生理想的有序的阳极多孔氧化铝与所需的孔间隔。
A new type of process for the fabrication of ideally ordered anodic porous alumina with the desired hole interval based on the deformation of a polymer template and the subsequent formation of a metal mold is described. In this process, a pattern composed of an ordered array of concave structures is first prepared on a polymer sheet by imprinting using a starting metal (Ni) mold, and the interval in the pattern is tuned through the deformation of the polymer sheet. The Ni mold with the pattern having the tuned interval is formed by the electroplating of Ni using the polymer sheet as a template. Finally, the pretexturing of Al by imprinting using the obtained Ni mold and subsequent anodization generate ideally ordered anodic porous alumina with the desired hole interval.