Cubic Aluminum Nitride Transformed Under Reduced Pressure Using Aerosol Deposition Method
Cubic Aluminum Nitride Transformed Under Reduced Pressure Using Aerosol Deposition Method
复制标题
采用气溶胶沉积法减压转化立方氮化铝
DOI：
10.1111/j.1551-2916.2005.00215.x
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发表时间：
2005
影响因子：
3.9
通讯作者：
M. Lebedev
中科院分区：
文献类型：
--
作者：
A. Iwata;J. Akedo;M. Lebedev
对于非常难以制造的立方氮化铝，期望更高的导热率。采用气溶胶沉积法在室温下制备了具有岩盐（立方）和纤锌矿混晶结构的氮化铝厚膜。最大显微维氏硬度值为1200。一次粉末具有纤锌矿结构，这表明部分原始晶体发生了转变。只有非常小的微晶发生转变。这种转变应该是通过粒子对薄膜的冲击而发生的。撞击时的压力估计只有7 GPa。
Higher thermal conductivity is expected for cubic aluminum nitride that is very difficult to make. Thick aluminum nitride films that have mixed crystal structures of rock salt (cubic) and wurtzite are made at room temperature by aerosol deposition method. The maximum micro-Vickers hardness number is 1200. The primary powder has wurtzite structure, which indicates part of the original crystals is transformed. Only very small crystallites are transformed. The transformation is supposed to occur by shock of the particle impact on the film. The pressure at the impact is estimated to be only 7 GPa.