HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE
HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE
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DOI：
10.1143/jjap.23.810
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发表时间：
1984-01-01
期刊：
影响因子：
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通讯作者：
HAMAKAWA, Y
中科院分区：
文献类型：
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作者：
FUJIMOTO, F;OOTUKA, A;HAMAKAWA, Y
采用1h (15n, αγ) 12c核反应（NR）和红外吸收光谱（IR）测定了硅烷与甲烷或乙烯混合气体等离子体分解制备的a-SiC: H薄膜中氢的含量。将chn （n= 1、2和3）拉伸模式的反吸收截面的平均值取为A s= 1.0× 10 21 cm-2，可以使两种方法对大多数薄膜的观测结果很好地吻合。在某些硅烷与乙烯混合制备的薄膜中，NR给氢量高于IR给氢量。从含氢量超过30atm的薄膜中释放氢。%，在NR分析中观察。通过对比离子轰击前后的红外光谱，讨论了氢释放的机理。
The hydrogen content in a-SiC: H films prepared by the plasma decomposition of gas mixtures of silane and methane or ethylene was measured by 1 H (15 N, αγ) 12 C nuclear reaction (NR) and infrared absorption spectroscopy (IR). The contents observed by both methods can be made to agree well for most of the films by putting the average value of the inverse absorption cross section for the CH n (n= 1, 2 and 3) stretching mode over all values of n as A s= 1.0× 10 21 cm-2. In some films prepared from silane and ethylene mixtures, the hydrogen content given by NR was higher than that by IR. Hydrogen release from films with a hydrogen content of over 30 atm.% was observed during NR analysis. The mechanism of the hydrogen release is discussed by comparing the IR spectra before and after ion bombardment.