Full-wave analysis of piezoelectric boundary waves propagating along metallic grating sandwiched in between two semi-infinite layers
Full-wave analysis of piezoelectric boundary waves propagating along metallic grating sandwiched in between two semi-infinite layers
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DOI：
10.1109/tuffc.2009.1103
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发表时间：
2009-04
期刊：
影响因子：
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通讯作者：
Yiliu Wang;K. Hashimoto;T. Omori;M. Yamaguchi
中科院分区：
文献类型：
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作者：
Yiliu Wang;K. Hashimoto;T. Omori;M. Yamaguchi
本文描述了沿夹在两个半无限层之间的金属光栅传播的压电边界声波 (PBAW) 的全波分析。在分析中，有限元法（FEM）用于光栅区域，而谱域分析（SDA）用于各向同性覆盖区域以及压电基板区域。 FEM 和 SDA 的结合使数值分析变得非常快速和精确。例如，对在 SiO2 覆盖层/Cu 光栅/旋转 Y 切割 LiNbO3 结构中传播的 PBAW 进行了分析。结果表明，水平剪切 (SH) 型和瑞利型 PBAW 均受到结构支撑，并且它们的速度非常接近。因此，对于器件实现而言，应完全抑制由瑞利型 PBAW 引起的杂散响应。详细讨论了Cu光栅厚度、基底旋转角度和金属化率对SH型和瑞利型PBAW激发和传播特性的影响。
This paper describes full-wave analysis of piezoelectric boundary acoustic waves (PBAWs) propagating along a metallic grating sandwiched in between two semi-infinite layers. In the analysis, the finite element method (FEM) is used for the grating region while the spectral domain analysis (SDA) is applied for an isotropic overlay region as well as a piezoelectric substrate region. Combination of the FEM and SDA makes the numerical analysis very fast and precise. As an example, the analysis was made on the PBAWs propagating in an SiO2 overlay/Cu grating/rotated Y-cut LiNbO3 structure. It is shown that both the shear-horizontal (SH) type and Rayleigh-type PBAWs are supported in the structure, and that their velocities are very close to each other. Thus spurious responses due to the Rayleigh-type PBAW should completely be suppressed for device implementation. Discussions are made in detail on the influence of Cu grating thickness, substrate rotation angle, and metallization ratio on excitation and propagation characteristics of the SH- and Rayleigh-type PBAWs.